Browsing by author "Farrel, Leo"
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Influence of varying porogen loads and different UV cures on low-k film characteristics
Farrel, Leo; Verdonck, Patrick; Van Besien, Els; Ciofi, Ivan; Borrello, Gianpaolo; Vanstreels, Kris; Mardani, Shabnam; Baklanov, Mikhaïl (2011)