Browsing by author "Voogt, Frans"
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The influence of TiN thickness and SiO2 formation method on the structural and electrical properties of TiN/HfO2/SiO2 gate stacks
Vellianitis, Georgios; Van Dal, Mark; Boccardi, Guillaume; Duriez, Blandine; Voogt, Frans; Kaiser, Monja; Witters, Liesbeth; Lander, Rob (2009)