Browsing by author "Hoeks, Maarten"

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SLM device for 193 nm lithographic applications

Lauria, John; Albright, Ronald; Vladimirsky, Olga; Chen, Luoqi; Hoeks, Maarten; Vanneer, Roel; van Drieënhuizen, Bert; Haspeslagh, Luc; Witvrouw, Ann; Schlatmann, Bart (2008)