Browsing by author "Keldermans, Johan"
Now showing items 1-2 of 2
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Alternative photoresist removal process to minimize damage of low-k material induced by ash plasma
Le, Quoc Toan; Keldermans, Johan; Chiodarelli, Nicolo; Kesters, Els; Lux, Marcel; Claes, Martine; Vereecke, Guy (2008) -
Alternative photoresist removal process to minimize damage of low-k material induced by ash plasma
Le, Quoc Toan; Keldermans, Johan; Chiodarelli, Nicolo; Kesters, Els; Lux, Marcel; Claes, Martine; Vereecke, Guy (2007-11)