Browsing by author "Li, Muyang"
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Evaluation of wet Cu seed deposition to enable downscaling damascene metallization
Armini, Silvia; Li, Muyang; Swerts, Johan; Siew, Yong Kong; Caluwaerts, Rudy; Meersschaut, Johan; Franquet, Alexis; Moussa, Alain; Leunissen, Peter (2012)