Browsing by author "Kim, Kyung Hyun"

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Particle removal efficiency and damage analysis on silicon wafers after megasonic cleaning in solvents

Barbagini, Francesca; Halder, Sandip; Janssens, Tom; Kenis, Karine; Wostyn, Kurt; Bearda, Twan; Le, Quoc Toan; Leunissen, Peter; Mertens, Paul; Kim, Kyung Hyun; Andreas, Michael (2009)
Roadblocks and critical aspects for sub 45 nm wafer cleaning and possible solutions

Mertens, Paul; Vos, Rita; Vereecke, Guy; Janssens, Tom; Wostyn, Kurt; Claes, Martine; Kesters, Els; Le, Quoc Toan; Halder, Sandip; Hoyer, Ronald; Andreas, Michael; Kim, Kyung Hyun; Barbagini, Francesca; Zijlstra, Aaldert; Holsteyns, Frank; Kim, Tae-Gon; Kenis, Karine; Arnauts, Sophia; Lux, Marcel; Bearda, Twan; Heyns, Marc (2008)