Authors

Barbagini, Francesca; Halder, Sandip; Janssens, Tom; Kenis, Karine; Wostyn, Kurt; Bearda, Twan; Le, Quoc Toan; Leunissen, Peter; Mertens, Paul; Kim, Kyung Hyun; Andreas, Michael

ISSN

0169-4243

Issue

12

Journal

Journal of Adhesion Science and Technology

Volume

23

Title

Particle removal efficiency and damage analysis on silicon wafers after megasonic cleaning in solvents

Publication type

Journal article

Embargo date

9999-12-31