Publication:

Particle removal efficiency and damage analysis on silicon wafers after megasonic cleaning in solvents

Date

2009
Journal article
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Author(s)

Barbagini, Francesca
;
Halder, Sandip  
;
Janssens, Tom
;
Kenis, Karine  
;
Wostyn, Kurt  
;
Bearda, Twan
;
Le, Quoc Toan  
;
Leunissen, Peter
;
Mertens, Paul  
;
Kim, Kyung Hyun
;
Andreas, Michael

Journal

Journal of Adhesion Science and Technology

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2016 since deposited on 2021-10-17
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