Browsing by author "Zhang, Xunyuan"
Now showing items 1-2 of 2
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The impact of ALD TaN barrier processes on different BEOL utra low-k dielectrics
Zhang, Xunyuan; Gillot, Christophe; Zhao, Larry; Ryan, Todd; Wu, Chen (2015) -
The impact of PEALD TaN barrier processes on different ultra low-k dielectrics
Zhang, Xunyuan; Gillot, Christophe; Zhao, Larry; Ryan, E. Todd; Wu, Chen (2015)