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The impact of PEALD TaN barrier processes on different ultra low-k dielectrics
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Authors
Zhang, Xunyuan
;
Gillot, Christophe
;
Zhao, Larry
;
Ryan, E. Todd
;
Wu, Chen
ISSN
2162-8769
Issue
12
Journal
ECS Journal of Solid State Science and Technology
Volume
4
Title
The impact of PEALD TaN barrier processes on different ultra low-k dielectrics
Publication type
Journal article
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