Browsing by author "Schuhmacher, Jorg"
Now showing items 21-25 of 25
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Opportunities and challenges for integration of ALD barrier layers in damascene process flows
Sprey, Hessel; Schuhmacher, Jorg; Travaly, Youssef; Sutcliffe, Victor; Abell, Thomas; Bastings, Hans; Stokhof, Maarten; Haukka, Suvi; Li, Wei-Min; Beyer, Gerald; Raaijmakers, Ivo (2004) -
Plasma sealing of a low-k dielectric polymer
Martin Hoyas, Ana; Schuhmacher, Jorg; Whelan, Caroline; Celis, Jean-Pierre; Maex, Karen (2004) -
Self-assembled monolayers as model substrates for atomic layer deposition
Whelan, Caroline; Demas, Anne-Cécile; Schuhmacher, Jorg; Carbonell, Laure; Maex, Karen (2004) -
Surface engineering using self-assembled monolayers: model substrates for atomic-layer deposition
Whelan, Caroline; Demas, Anne-Cécile; Romo Negreira, Ainhoa; Fernandez Landaluce, Tatiana; Schuhmacher, Jorg; Carbonell, Laure; Maex, Karen (2005) -
Using self-assembled monolayers as model substrates for atomic layer Deposition
Whelan, Caroline; Demas, A.C.; Schuhmacher, Jorg; Maex, Karen (2004)