Authors

Sprey, Hessel; Schuhmacher, Jorg; Travaly, Youssef; Sutcliffe, Victor; Abell, Thomas; Bastings, Hans; Stokhof, Maarten; Haukka, Suvi; Li, Wei-Min; Beyer, Gerald; Raaijmakers, Ivo

Conference

Atomic Layer Deposition Conference

Title

Opportunities and challenges for integration of ALD barrier layers in damascene process flows

Publication type

Proceedings paper