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Opportunities and challenges for integration of ALD barrier layers in damascene process flows

Date

2004
Proceedings Paper
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dc.contributor.authorSprey, Hessel
dc.contributor.authorSchuhmacher, Jorg
dc.contributor.authorTravaly, Youssef
dc.contributor.authorSutcliffe, Victor
dc.contributor.authorAbell, Thomas
dc.contributor.authorBastings, Hans
dc.contributor.authorStokhof, Maarten
dc.contributor.authorHaukka, Suvi
dc.contributor.authorLi, Wei-Min
dc.contributor.authorBeyer, Gerald
dc.contributor.authorRaaijmakers, Ivo
dc.contributor.imecauthorSprey, Hessel
dc.contributor.imecauthorBastings, Hans
dc.contributor.imecauthorStokhof, Maarten
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorRaaijmakers, Ivo
dc.date.accessioned2021-10-15T16:23:47Z
dc.date.available2021-10-15T16:23:47Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9628
dc.source.conferenceAtomic Layer Deposition Conference
dc.source.conferencedate16/08/2004
dc.source.conferencelocationHelsinki Finland
dc.title

Opportunities and challenges for integration of ALD barrier layers in damascene process flows

dc.typeProceedings paper
dspace.entity.typePublication
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