Now showing items 21-21 of 21

    • Ultra-shallow junction profiling 

      Vandervorst, Wilfried; Clarysse, Trudo; Duhayon, Natasja; Eyben, Pierre; Hantschel, Thomas; Xu, Mingwei; Janssens, Tom; De Witte, Hilde; Conard, Thierry; Deleu, Jeroen; Badenes, Gonçal (2000)