Browsing by author "Deleu, Jeroen"
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Ultra-shallow junction profiling
Vandervorst, Wilfried; Clarysse, Trudo; Duhayon, Natasja; Eyben, Pierre; Hantschel, Thomas; Xu, Mingwei; Janssens, Tom; De Witte, Hilde; Conard, Thierry; Deleu, Jeroen; Badenes, Gonçal (2000)