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Ultra-shallow junction profiling
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Authors
Vandervorst, Wilfried
;
Clarysse, Trudo
;
Duhayon, Natasja
;
Eyben, Pierre
;
Hantschel, Thomas
;
Xu, Mingwei
;
Janssens, Tom
;
De Witte, Hilde
;
Conard, Thierry
;
Deleu, Jeroen
;
Badenes, Gonçal
Conference
IEDM Technical Digest
Title
Ultra-shallow junction profiling
Publication type
Proceedings paper
Embargo date
9999-12-31
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