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Conference contributions
Ultra-shallow junction profiling
Publication:
Ultra-shallow junction profiling
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Date
2000
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Clarysse, Trudo
;
Duhayon, Natasja
;
Eyben, Pierre
;
Hantschel, Thomas
;
Xu, Mingwei
;
Janssens, Tom
;
De Witte, Hilde
;
Conard, Thierry
;
Deleu, Jeroen
;
Badenes, Gonçal
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1885
since deposited on 2021-10-14
Acq. date: 2025-12-16
Citations
Metrics
Views
1885
since deposited on 2021-10-14
Acq. date: 2025-12-16
Citations