Publication:

Ultra-shallow junction profiling

Date

2000
Proceedings Paper
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dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorClarysse, Trudo
dc.contributor.authorDuhayon, Natasja
dc.contributor.authorEyben, Pierre
dc.contributor.authorHantschel, Thomas
dc.contributor.authorXu, Mingwei
dc.contributor.authorJanssens, Tom
dc.contributor.authorDe Witte, Hilde
dc.contributor.authorConard, Thierry
dc.contributor.authorDeleu, Jeroen
dc.contributor.authorBadenes, Gonçal
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorDuhayon, Natasja
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorConard, Thierry
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-14T14:08:33Z
dc.date.available2021-10-14T14:08:33Z
dc.date.embargo9999-12-31
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4880
dc.source.beginpage429
dc.source.conferenceIEDM Technical Digest
dc.source.conferencedate10/12/2000
dc.source.conferencelocationSan Francisco, CA USA
dc.source.endpage432
dc.title

Ultra-shallow junction profiling

dc.typeProceedings paper
dspace.entity.typePublication
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