Browsing by author "Schleicher, Filip"
Now showing items 21-22 of 22
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Towards high NA patterning readiness: Materials, processes and etch transfer for P24 Line Space
Santaclara, J. G.; Maslow, M. J.; Thiam, Arame; Franke, Joern-Holger; Schleicher, Filip; Blanc, Romuald; Bezard, Philippe; Moussa, Alain; Hendrickx, Eric; Wong, Patrick (2021) -
Wafer-Scale Hybrid Integration of InP DFB Lasers on Si Photonics by Flip-Chip Bonding With sub-300 nm Alignment Precision
Marinins, Aleksandrs; Hansch, Sebastian; Sar, Huseyin; Chancerel, Francois; Golshani, Negin; Wang, Hsiao-Lun; Tsiara, Artemisia; Coenen, David; Verheyen, Peter; Capuz, Giovanni; De Koninck, Yannick; Yilmaz, Ozan; Morthier, Geert; Schleicher, Filip; Jamieson, Geraldine; Smyth, Stuart; McKee, Andrew; Ban, Yoojin; Pantouvaki, Marianna; La Tulipe, Douglas Charles; Van Campenhout, Joris (2023)