Browsing by author "Dictus, Dries"
Now showing items 21-24 of 24
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Study of photon induced volatilization of copper and process control of metal etch plasmas
Dictus, Dries (2011-01) -
Unusual modification of CuCl or CuBr films by He plasma exposure resulting in nanowire formation
Dictus, Dries; Baklanov, Mikhaïl; Pikulev, Vitaly; De Gendt, Stefan; Vinckier, Chris; Boullart, Werner; Vanhaelemeersch, Serge (2010) -
Using ellipsometry for assessment of TiN surface roughness after plasma etch
Shamiryan, Denis; Paraschiv, Vasile; Dictus, Dries; Baklanov, Mikhaïl; Beckx, Stephan; Boullart, Werner (2008) -
Wet etch characteristics of Hf-silicates
Claes, Martine; Paraschiv, Vasile; Dictus, Dries; Conard, Thierry; Boullart, Werner; Vanhaelemeersch, Serge; De Gendt, Stefan (2005)