Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Articles
View item
imec Publications Repository
imec Publications
Articles
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Using ellipsometry for assessment of TiN surface roughness after plasma etch
View/
open
16140.pdf (440.9Kb)
Metadata
Show full item record
Authors
Shamiryan, Denis
;
Paraschiv, Vasile
;
Dictus, Dries
;
Baklanov, Mikhaïl
;
Beckx, Stephan
;
Boullart, Werner
Issue
2
Journal
Journal of the Electrochemical Sosiety
Volume
155
Title
Using ellipsometry for assessment of TiN surface roughness after plasma etch
Publication type
Journal article
Embargo date
9999-12-31
Collections
Articles
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login