Browsing imec Publications by author "Machulin, Vladimir"
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Mechanisms of oxygen precipitation in Cz-Si wafers subjected to rapid thermal anneals
Sarikov, Andrey; Litovchenko, Vladimir; Lisovskyy, Igor; Voitovich, Maria; Zlobin, Sergei; Kladko, Vasyl; Slobodyan, Nikolay; Machulin, Vladimir; Claeys, Cor (2011)