Browsing imec Publications by author "Machida, Takahiro"
Now showing items 1-2 of 2
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Comparison of back side chrome focus monitor to focus self-metrology of an immersion scanner
D'have, Koen; Machida, Takahiro; Laidler, David; Cheng, Shaunee (2007) -
Double patterning design split implementation and validation for the 32nm node
Drapeau, Martin; Wiaux, Vincent; Hendrickx, Eric; Verhaegen, Staf; Machida, Takahiro (2007)