Browsing imec Publications by imec author "97ba14721ce36bfb9c202ece7b579b276a5d10c4"
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Scaling and readiness of underlayers for high-NA EUV lithography
Fallica, Roberto; De Simone, Danilo; Chen, Steven; Safdar, Muhammad; Suh, Hyo Seon (2022) -
Scaling and readiness of underlayers for high-numerical aperture extreme ultraviolet lithography
Fallica, Roberto; De Simone, Danilo; Chen, Steven; Safdar, Muhammad; Suh, Hyo Seon (2022)