Browsing imec Publications by author "Saerens, A."
Now showing items 1-1 of 1
-
Characterization of reduced-pressure chemical vapor deposition polycrystalline silicon germanium deposited at temperatures <= 550 degrees C
Sedky, S.; Witvrouw, Ann; Caymax, Matty; Saerens, A.; Van Houtte, P. (2002)