Browsing imec Publications by author "Abell, T."
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Characterization of atomic layer deposited nanoscale structure on dense dielectric substrates by X-ray reflectivity
Travaly, Youssef; Schuhmacher, J.; Martin Hoyas, Ana; Abell, T.; Sutcliffe, Vic; Jonas, M.; Van Hove, Marleen; Maex, Karen (2005)