Recently added

High-NA EUV mask pattern characterization using advanced mask CD-SEM metrology

Bekaert, Joost; Baskaran, Balakumar; Van Look, Lieve; Franke, Joern-Holger; Philipsen, Vicky; Niroomand, Ardavan; Hendrickx, Eric; Komami, Hideaki; Okawa, Tatsuro; Shida, Soichi; Kojima, Shinichi; Iwai, Toshimichi (2024)

High NA EUV single patterning of advanced metal logic nodes: Inverse lithography techniques in combination with alternative mask absorbers

Armeanu, Ana-Maria; Pellens, Nick; Philipsen, Vicky; Malankin, Evgeny; Xu, Dongbo; Mizuuchi, Keisuke; Curvacho, Gabriel; Wei, Chih-, I; Lafferty, Neal; Fenger, Germain (2024)

Multi-level Analysis of GPU Utilization in ML Training Workloads

Delestrac, Paul; Bhattacharjee, Debjyoti; Yang, Simei; Moolchandani, Diksha; Catthoor, Francky; Torres, Lionel; Novo, David (2024)

Toward Fine-Grained Partitioning of Low-Level SRAM Caches for Emerging 3D-IC Designs

Das, Sudipta; Kumari, Bhawana; Sahoo, Siva Satyendra; Chen, Yukai; Myers, James; Milojevic, Dragomir; Biswas, Dwaipayan; Ryckaert, Julien (2024)

System-Technology Co-Optimization for Dense Edge Architectures Using 3-D Integration and Nonvolatile Memory

Giacomini Rocha, Leandro M.; Naeim, Mohamed; Paim, Guilherme; Brunion, Moritz; Venugopal, Priya; Milojevic, Dragomir; Myers, James; Badaroglu, Mustafa; Verhelst, Marian; Ryckaert, Julien; Biswas, Dwaipayan (2024)

A Novel Chest-Based PPG Measurement System

Lin, Qiuyang; Wang, Haocun; Biswas, Dwaipayan; Li, Zheyi; Lutin, Erika; van Hoof, Chris; Chen, Mingyi; van Helleputte, Nick (2024)

Heterogeneous tunable III-V-on-silicon-nitride mode-locked laser emitting wide optical spectra

Billet, Maximilien; Cuyvers, Stijn; Poelman, Stijn; Hermans, Artur; Seema Saseendran, Sandeep; Nakamura, Tasuku; Kamoto, Shinyao; Inada, Yasuhisa; Hisada, Kazuya; Hirasawa, Taku; Ramirez, Joan; Neel, Delphine; Vaissiere, Nicolas; Decobert, Jean; Soussan, Philippe; Rottenberg, Xavier; Roelkens, Gunther; Kjellman, Jon; Kuyken, Bart (2024)

Extreme silicon thinning for back side power delivery network: Si thinning stopping on scaled SiGe etch stop layer

Sebaai, Farid; Loo, Roger; Jourdain, Anne; Beyne, Eric; Kawarazaki, Hikaru; Nakano, Teppei; Altamirano Sanchez, Efrain (2024)

No More Mumbles: Enhancing Robot Intelligibility Through Speech Adaptation

Ren, Qiaoqiao; Hou, Yuanbo; Botteldooren, Dick; Belpaeme, Tony (2024)

Advanced Bends and Micro Ring Resonators in Silicon Nitride Photonic Waveguides for C-Band

Song, Jeonghwan; Kongnyuy, Tangla David; Prost, Mathias; Bandyopadhyay, Aritrio; Dwivedi, Sarvagya Paavan; Carbajal Altamirano, Diego; Cummins, Cian; Seema Saseendran, Sandeep; Helin, Philippe; Brouckaert, Joost; Dahlem, Marcus (2024)

Time-dependent conduction mechanisms in reversed stepped superlattice layers of GaN HEMTs on 200 mm engineered substrates

Chen, Zequan; Uren, Michael J.; Huang, Peng; Sanyal, Indraneel; Smith, Matthew D.; Vohra, Anurag; Kumar, Sujit; Decoutere, Stefaan; Bakeroot, Benoit; Kuball, Martin (2024)

Mg activation anneal of the p-GaN body in trench gate MOSFETs and its effect on channel mobility and threshold voltage stability

Goncalez Filho, Walter; Borga, Matteo; Geens, Karen; Khan, Md Arif; Cingu, Deepthi; Chatterjee, Urmimala; Vohra, Anurag; Decoutere, Stefaan; Bakeroot, Benoit (2024)

Mitigating pattern collapse in high-resolution extreme ultraviolet lithography using the organic dry development rinse process

Heo, Seonggil; Baek, Seungjoo; Gupta, Mihir; Suh, Hyo Seon; Kato, Kodai; Takeda, Satoshi; Shibayama, Wataru; Sakamoto, Rikimaru (2024)

Energy-efficient optical crosslinking of underlayers for sustainable and low-power semiconductor manufacturing

Baek, Seungjoo; Vandereyken, Jelle; Suh, Hyo Seon; Caron, Elke; Santos, Andreia; Harumoto, Masahiko; Guerrero, Douglas J.; Heo, Seonggil (2024)

Graphene-Based Silicon Photonic Electro-Absorption Modulators and Phase Modulators

Wu, Chenghan; Reep, Tom; Brems, Steven; Yudistira, Didit; Van Campenhout, Joris; Asselberghs, Inge; Huyghebaert, Cedric; Pantouvaki, Marianna; Wang, Zheng; Van Thourhout, Dries (2024)

Si/SiO2 silicon-on-insulator based scaffold for interfacing with cerebral organoids

Delahanty, Aaron; Shaikh, Sohail Faizan; Salmon, Idris; Andrei, Alexandru; Okudur, Oguzhan Orkut; Gonzalez, Mario; Lagae, Liesbet; Ranga, Adrian; Braeken, Dries (2024)

THE FOREIGN SUBSIDIES REGULATION. MORE THAN A COMPETITION TOOL FOR THE MEDIA SECTOR?

Afilipoaie, Adelaida (2024)

Study reactive ion etching- transformer coupled plasma (RIE-TCP) mode for patterning of MgZnO alloys, used for computing and memory applications

Ghorbani, Leila; Kundu, Shreya; Lazzarino, Frederic; De Gendt, Stefan (2023-09-25)

Limitations of audiovisual speech on robots for second language pronunciation learning

Amioka, Saya; Janssens, Ruben; Wolfert, Pieter; ren, Qiaoqiao; Pinto Bernal, Maria Jose; Belpaeme, Tony (2023)

Gate patterning development for monolithic CFET integration

Dupuy, Emmanuel; Tao, Zheng; Mertens, Hans; Demuynck, Steven; Hosseini, Maryam; Zhou, Daisy; Wang, Shouhua; Sebaai, Farid; Batuk, Dmitry; Horiguchi, Naoto; Chan, BT; Lazzarino, Frederic (2023-02-28)

imec Publications: Recent submissions

High-NA EUV mask pattern characterization using advanced mask CD-SEM metrology ﻿

High NA EUV single patterning of advanced metal logic nodes: Inverse lithography techniques in combination with alternative mask absorbers ﻿

Multi-level Analysis of GPU Utilization in ML Training Workloads ﻿

Toward Fine-Grained Partitioning of Low-Level SRAM Caches for Emerging 3D-IC Designs ﻿

System-Technology Co-Optimization for Dense Edge Architectures Using 3-D Integration and Nonvolatile Memory ﻿

A Novel Chest-Based PPG Measurement System ﻿

Heterogeneous tunable III-V-on-silicon-nitride mode-locked laser emitting wide optical spectra ﻿

Extreme silicon thinning for back side power delivery network: Si thinning stopping on scaled SiGe etch stop layer ﻿

No More Mumbles: Enhancing Robot Intelligibility Through Speech Adaptation ﻿

Advanced Bends and Micro Ring Resonators in Silicon Nitride Photonic Waveguides for C-Band ﻿

Time-dependent conduction mechanisms in reversed stepped superlattice layers of GaN HEMTs on 200 mm engineered substrates ﻿

Mg activation anneal of the p-GaN body in trench gate MOSFETs and its effect on channel mobility and threshold voltage stability ﻿

Mitigating pattern collapse in high-resolution extreme ultraviolet lithography using the organic dry development rinse process ﻿

Energy-efficient optical crosslinking of underlayers for sustainable and low-power semiconductor manufacturing ﻿

Graphene-Based Silicon Photonic Electro-Absorption Modulators and Phase Modulators ﻿

Si/SiO2 silicon-on-insulator based scaffold for interfacing with cerebral organoids ﻿

THE FOREIGN SUBSIDIES REGULATION. MORE THAN A COMPETITION TOOL FOR THE MEDIA SECTOR? ﻿

Study reactive ion etching- transformer coupled plasma (RIE-TCP) mode for patterning of MgZnO alloys, used for computing and memory applications ﻿

Limitations of audiovisual speech on robots for second language pronunciation learning ﻿

Gate patterning development for monolithic CFET integration ﻿