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The effect of backside particles on substrate topography

dc.contributor.authorBearda, Twan
dc.contributor.authorMertens, Paul
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorDe Bisschop, Peter
dc.contributor.authorCompen, Rene
dc.contributor.authorvan Meer, Aschwin
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-16T00:44:37Z
dc.date.available2021-10-16T00:44:37Z
dc.date.issued2005-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10071
dc.sourceIIOimport
dc.titleThe effect of backside particles on substrate topography
dc.typeJournal article
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorDe Bisschop, Peter
dc.contributor.imecauthorHeyns, Marc
dc.source.peerreviewno
dc.source.beginpage7409
dc.source.endpage7413
dc.source.journalJapanese Journal of Applied Physics
dc.source.issue10
dc.source.volume44
imec.availabilityPublished - imec


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