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MOCVD of Sr-containing oxides: transport properties and deposition mechanisms of the Sr(tmhd)(2)center dot pmdeta precursor

dc.contributor.authorBedoya, C.
dc.contributor.authorCondorelli, G.G.
dc.contributor.authorMotta, A.
dc.contributor.authorMauro, A.
dc.contributor.authorAnastasi, G.
dc.contributor.authorFragala, I.L.
dc.contributor.authorLisoni, Judit
dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-16T00:44:54Z
dc.date.available2021-10-16T00:44:54Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10076
dc.sourceIIOimport
dc.titleMOCVD of Sr-containing oxides: transport properties and deposition mechanisms of the Sr(tmhd)(2)center dot pmdeta precursor
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage269
dc.source.endpage275
dc.source.journalChemical Vapor Deposition
dc.source.issue5
dc.source.volume11
imec.availabilityPublished - imec


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