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Growth and characterization of near-atomically flat, thick homoepitaxial CVD diamond films

dc.contributor.authorBogdan, G.
dc.contributor.authorNesladek, Milos
dc.contributor.authorD'Haen, Jan
dc.contributor.authorMaes, J.
dc.contributor.authorMoshchalkov, V.V.
dc.contributor.authorHaenen, Ken
dc.contributor.authorD'Olieslaeger, Marc
dc.date.accessioned2021-10-16T00:47:48Z
dc.date.available2021-10-16T00:47:48Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10121
dc.sourceIIOimport
dc.titleGrowth and characterization of near-atomically flat, thick homoepitaxial CVD diamond films
dc.typeJournal article
dc.contributor.imecauthorNesladek, Milos
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorHaenen, Ken
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.beginpage2066
dc.source.endpage2072
dc.source.journalPhysica Status Solidi A
dc.source.issue11
dc.source.volume202
imec.availabilityPublished - imec


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