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Characterization of high and low dielectrica using low Energy Time of Flight Elastic Recoil Detection

dc.contributor.authorBrijs, Bert
dc.contributor.authorSajavaara, T.
dc.contributor.authorGiangrandi, Simone
dc.contributor.authorArstila, K.
dc.date.accessioned2021-10-16T00:50:35Z
dc.date.available2021-10-16T00:50:35Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10155
dc.sourceIIOimport
dc.titleCharacterization of high and low dielectrica using low Energy Time of Flight Elastic Recoil Detection
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage106
dc.source.endpage109
dc.source.journalMicroelectronic Engineering
dc.source.volume80
imec.availabilityPublished - imec
imec.internalnotesPaper from 'Insulating Films on Semiconductors - INFOS' held in Leuven, June 2005


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