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Influence of the Pt electrode on the properties of sol-gel PZT-films

dc.contributor.authorWillems, Geert
dc.contributor.authorWouters, Dirk
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-09-29T13:26:06Z
dc.date.available2021-09-29T13:26:06Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1018
dc.sourceIIOimport
dc.titleInfluence of the Pt electrode on the properties of sol-gel PZT-films
dc.typeJournal article
dc.contributor.imecauthorWillems, Geert
dc.contributor.orcidimecWillems, Geert::0000-0002-9137-618X
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage217
dc.source.endpage220
dc.source.journalMicroelectronic Engineering
dc.source.volume29
imec.availabilityPublished - open access
imec.internalnotesProceedings 1st European Meeting on Integrated Ferroelectrics (EMIF 1). Nijmegen, 3-5 July 1995.


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