Show simple item record

Investigation of plasma hydrogenation and trapping mechanism for layer transfer

dc.contributor.authorChen, Peng
dc.contributor.authorChu, Paul K.
dc.contributor.authorHochbauer, T.
dc.contributor.authorLee, J-K
dc.contributor.authorNastasi, M.
dc.contributor.authorBuca, D.
dc.contributor.authorMantl, S
dc.contributor.authorLoo, Roger
dc.contributor.authorCaymax, Matty
dc.contributor.authorAlford, T.
dc.contributor.authorMayer, J.W.
dc.contributor.authorDavid Theodore, N.
dc.contributor.authorCai, M.
dc.contributor.authorSchmidt, B.
dc.contributor.authorLau, S.S.
dc.date.accessioned2021-10-16T00:56:03Z
dc.date.available2021-10-16T00:56:03Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10210
dc.sourceIIOimport
dc.titleInvestigation of plasma hydrogenation and trapping mechanism for layer transfer
dc.typeJournal article
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.beginpage031904-1
dc.source.endpage031904-3
dc.source.journalApplied Physics Letters
dc.source.issue3
dc.source.volume86
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record