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Ablation of transparent materials using excimer lasers for photonic applications

dc.contributor.authorChen, Y.T.
dc.contributor.authorNaessens, Kris
dc.contributor.authorBaets, Roel
dc.contributor.authorLiao, Y.S.
dc.contributor.authorTseng, A.A.
dc.date.accessioned2021-10-16T00:56:17Z
dc.date.available2021-10-16T00:56:17Z
dc.date.issued2005-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10212
dc.sourceIIOimport
dc.titleAblation of transparent materials using excimer lasers for photonic applications
dc.typeJournal article
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.source.peerreviewno
dc.source.beginpage427
dc.source.endpage441
dc.source.journalOptical Review
dc.source.issue6
dc.source.volume12
imec.availabilityPublished - imec


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