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Shift and ratio method revisited: extraction of the fin width in multi-gate devices

dc.contributor.authorCollaert, Nadine
dc.contributor.authorDixit, Abhisek
dc.contributor.authorKottantharayil, Anil
dc.contributor.authorRooyackers, Rita
dc.contributor.authorVeloso, Anabela
dc.contributor.authorDe Meyer, Kristin
dc.date.accessioned2021-10-16T01:00:44Z
dc.date.available2021-10-16T01:00:44Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10247
dc.sourceIIOimport
dc.titleShift and ratio method revisited: extraction of the fin width in multi-gate devices
dc.typeJournal article
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.source.peerreviewno
dc.source.beginpage763
dc.source.endpage768
dc.source.journalSolid-State Electronics
dc.source.issue5
dc.source.volume49
imec.availabilityPublished - imec


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