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Advanced material characterization by TOFSIMS in microelectronics

dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-16T01:01:39Z
dc.date.available2021-10-16T01:01:39Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10254
dc.sourceIIOimport
dc.titleAdvanced material characterization by TOFSIMS in microelectronics
dc.typeBook chapter
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage437
dc.source.bookMaterials for Information Technology. Devices, Interconnects and Packaging
dc.source.endpage447
imec.availabilityPublished - open access
imec.internalnotesPaper from EUROMAT 2003


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