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Characterization of (near) hermetic zero-level packages for MEMS

dc.contributor.authorDe Moor, Piet
dc.contributor.authorBaert, Kris
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorJourdain, Anne
dc.contributor.authorTilmans, Harrie
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-16T01:09:31Z
dc.date.available2021-10-16T01:09:31Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10309
dc.sourceIIOimport
dc.titleCharacterization of (near) hermetic zero-level packages for MEMS
dc.typeProceedings paper
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage26
dc.source.endpage35
dc.source.conferenceReliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
dc.source.conferencedate24/01/2005
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 5716


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