Corrosion of copper interconnects
dc.contributor.author | Ernur, Didem | |
dc.date.accessioned | 2021-10-16T01:31:03Z | |
dc.date.available | 2021-10-16T01:31:03Z | |
dc.date.issued | 2005-01 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10434 | |
dc.source | IIOimport | |
dc.title | Corrosion of copper interconnects | |
dc.type | PHD thesis | |
dc.contributor.imecauthor | Ernur, Didem | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.contributor.thesisadvisor | Maex, Karen | |
imec.availability | Published - open access |