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Scanning spreading resistance microscopy (SSRM) 2d carrier profiling for ultra-shallow junction characterization in deep-submicron technologies

dc.contributor.authorEyben, Pierre
dc.contributor.authorJanssens, Tom
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-16T01:33:18Z
dc.date.available2021-10-16T01:33:18Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10446
dc.sourceIIOimport
dc.titleScanning spreading resistance microscopy (SSRM) 2d carrier profiling for ultra-shallow junction characterization in deep-submicron technologies
dc.typeJournal article
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage45
dc.source.endpage53
dc.source.journalMaterials Science and Engineering B
dc.source.volume124-125
imec.availabilityPublished - imec
imec.internalnotesPaper fron E-MRS Symposium D: Materials Science and Device Issues for Future Technologies; June 2005; Strasbourg


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