dc.contributor.author | Goux, Ludovic | |
dc.contributor.author | Lisoni, Judit | |
dc.contributor.author | Schwitters, Michael | |
dc.contributor.author | Paraschiv, Vasile | |
dc.contributor.author | Maes, D. | |
dc.contributor.author | Haspeslagh, Luc | |
dc.contributor.author | Wouters, Dirk | |
dc.contributor.author | Menou, M. | |
dc.contributor.author | Turquat, Ch. | |
dc.contributor.author | Madigou, V. | |
dc.contributor.author | Muller, Ch. | |
dc.contributor.author | Zambrano, R. | |
dc.date.accessioned | 2021-10-16T01:47:44Z | |
dc.date.available | 2021-10-16T01:47:44Z | |
dc.date.issued | 2005 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10516 | |
dc.source | IIOimport | |
dc.title | Composition control and ferroelectric properties of sidewall Sr0.8Bi2.2Ta2O9 in integrated 3-Dimensional ferroelectric capacitors | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Goux, Ludovic | |
dc.contributor.imecauthor | Paraschiv, Vasile | |
dc.contributor.imecauthor | Haspeslagh, Luc | |
dc.contributor.orcidimec | Goux, Ludovic::0000-0002-1276-2278 | |
dc.source.peerreview | no | |
dc.source.beginpage | 163 | |
dc.source.endpage | 166 | |
dc.source.conference | Proceedings 1st International Conference on Memory Technology and Design | |
dc.source.conferencedate | 21/05/2005 | |
dc.source.conferencelocation | Giens France | |
imec.availability | Published - imec | |