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Composition control and ferrolectric properties of sidewalls in three-dimensional SrBi2Ta2O9-based ferroelectric capacitors

dc.contributor.authorGoux, Ludovic
dc.contributor.authorLisoni, Judit
dc.contributor.authorSchwitters, Michael
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorMaes, David
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWouters, Dirk
dc.contributor.authorMenou, N.
dc.contributor.authorTurquat, Ch.
dc.contributor.authorMadigou, V.
dc.contributor.authorMuller, Ch.
dc.contributor.authorZambrano, R.
dc.date.accessioned2021-10-16T01:47:59Z
dc.date.available2021-10-16T01:47:59Z
dc.date.issued2005-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10517
dc.sourceIIOimport
dc.titleComposition control and ferrolectric properties of sidewalls in three-dimensional SrBi2Ta2O9-based ferroelectric capacitors
dc.typeJournal article
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.source.peerreviewno
dc.source.beginpage054507-1
dc.source.endpage054507-7
dc.source.journalJournal of Applied Physics
dc.source.issue5
dc.source.volume98
imec.availabilityPublished - imec


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