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Total reflection X-ray fluorescence spectrometry for the introduction of novel materials in clean room production environments

dc.contributor.authorHellin, David
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorRip, Jens
dc.contributor.authorVinckier, Chris
dc.date.accessioned2021-10-16T01:57:38Z
dc.date.available2021-10-16T01:57:38Z
dc.date.issued2005-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10561
dc.sourceIIOimport
dc.titleTotal reflection X-ray fluorescence spectrometry for the introduction of novel materials in clean room production environments
dc.typeJournal article
dc.contributor.imecauthorHellin, David
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorRip, Jens
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.beginpage639
dc.source.endpage651
dc.source.journalIEEE Trans. Device and Materials Reliability
dc.source.issue4
dc.source.volume5
imec.availabilityPublished - imec


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