Image placement error: closing the gap between overlay and imaging
dc.contributor.author | Hendrickx, Eric | |
dc.contributor.author | Colina, Alberto | |
dc.contributor.author | van der Hoff, Alex | |
dc.contributor.author | Finders, Jo | |
dc.contributor.author | Vandenberghe, Geert | |
dc.date.accessioned | 2021-10-16T01:59:30Z | |
dc.date.available | 2021-10-16T01:59:30Z | |
dc.date.issued | 2005 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10569 | |
dc.source | IIOimport | |
dc.title | Image placement error: closing the gap between overlay and imaging | |
dc.type | Journal article | |
dc.contributor.imecauthor | Hendrickx, Eric | |
dc.contributor.imecauthor | Vandenberghe, Geert | |
dc.source.peerreview | no | |
dc.source.beginpage | 33006 | |
dc.source.journal | Journal Microlith., Microfab., Microsyst., (JM3) | |
dc.source.issue | 3 | |
dc.source.volume | 4 | |
imec.availability | Published - imec |
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