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Megasonics: a cavitation driven process

dc.contributor.authorHolsteyns, Frank
dc.contributor.authorLee, Kuntack
dc.contributor.authorGraf, S.
dc.contributor.authorPalmans, Roger
dc.contributor.authorVereecke, Guy
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-16T02:07:46Z
dc.date.available2021-10-16T02:07:46Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10601
dc.sourceIIOimport
dc.titleMegasonics: a cavitation driven process
dc.typeProceedings paper
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.source.peerreviewno
dc.source.beginpage159
dc.source.endpage162
dc.source.conferenceUltra Clean Processing of Silicon Surfaces VII: Proceedings of the 7th International Symposium
dc.source.conferencedate20/09/2004
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - imec
imec.internalnotesSolid State Phenomena; Vol 103-104


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