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Silicides - Recent advances and prospects

dc.contributor.authorKittl, Jorge
dc.contributor.authorLauwers, Anne
dc.contributor.authorChamirian, Oxana
dc.contributor.authorKmieciak, Malgorzata
dc.contributor.authorVan Dal, Mark
dc.contributor.authorVeloso, Anabela
dc.contributor.authorKottantharayil, Anil
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-16T02:32:49Z
dc.date.available2021-10-16T02:32:49Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10699
dc.sourceIIOimport
dc.titleSilicides - Recent advances and prospects
dc.typeBook chapter
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorVan Dal, Mark
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage85
dc.source.bookMaterials for Information Technology. Devices, Interconnects and Packaging
dc.source.endpage97
imec.availabilityPublished - open access
imec.internalnotesEngineering Materials and Processes


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