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Avoiding MEMS failures

dc.contributor.authorLavu, Srikanth
dc.contributor.authorDesmulliez, Marc
dc.contributor.authorBegbie, Marc
dc.contributor.authorBall, George
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-16T02:48:32Z
dc.date.available2021-10-16T02:48:32Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10756
dc.sourceIIOimport
dc.titleAvoiding MEMS failures
dc.typeJournal article
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage22
dc.source.endpage25
dc.source.journalIEE Electronics Systems and Software
dc.source.issue5
dc.source.volume3
imec.availabilityPublished - imec


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