Show simple item record

Determining the impact of statistical fluctuations on resist edge roughness

dc.contributor.authorLeunissen, Peter
dc.contributor.authorErcken, Monique
dc.contributor.authorPatsis, G.P.
dc.date.accessioned2021-10-16T02:52:39Z
dc.date.available2021-10-16T02:52:39Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10771
dc.sourceIIOimport
dc.titleDetermining the impact of statistical fluctuations on resist edge roughness
dc.typeJournal article
dc.contributor.imecauthorErcken, Monique
dc.source.peerreviewno
dc.source.beginpage2
dc.source.endpage10
dc.source.journalMicroelectronic Engineering
dc.source.volume78-79
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record