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Sidewalls contribution in integrated three-dimensional Sr0.8Bi2.2Ta2O9-based ferroelectric capacitors

dc.contributor.authorMenou, M.
dc.contributor.authorTurquat, Ch.
dc.contributor.authorMadigou, V.
dc.contributor.authorMuller, Ch.
dc.contributor.authorGoux, Ludovic
dc.contributor.authorLisoni, Judit
dc.contributor.authorSchwitters, Michael
dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-16T03:24:23Z
dc.date.available2021-10-16T03:24:23Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10880
dc.sourceIIOimport
dc.titleSidewalls contribution in integrated three-dimensional Sr0.8Bi2.2Ta2O9-based ferroelectric capacitors
dc.typeJournal article
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.source.peerreviewno
dc.source.beginpage073502-1
dc.source.endpage073502-3
dc.source.journalApplied Physics Letters
dc.source.issue7
dc.source.volume87
imec.availabilityPublished - imec


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