Approaches to 3D Integration
| dc.contributor.author | Mertens, Robert | |
| dc.date.accessioned | 2021-10-16T03:26:20Z | |
| dc.date.available | 2021-10-16T03:26:20Z | |
| dc.date.issued | 2005-11 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10887 | |
| dc.source | IIOimport | |
| dc.title | Approaches to 3D Integration | |
| dc.type | Journal article | |
| dc.contributor.imecauthor | Mertens, Robert | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 51 | |
| dc.source.endpage | 54 | |
| dc.source.journal | Nikkei Microdevices | |
| imec.availability | Published - imec |
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