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Creep resistant aluminum alloys for use in MEMS

dc.contributor.authorModlinski, Robert
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorRatchev, Petar
dc.contributor.authorPuers, Bob
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-16T03:28:35Z
dc.date.available2021-10-16T03:28:35Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10894
dc.sourceIIOimport
dc.titleCreep resistant aluminum alloys for use in MEMS
dc.typeJournal article
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpageS165
dc.source.endpageS170
dc.source.journalJ. of Micromechanics and Microengineering
dc.source.issue7
dc.source.volume15
imec.availabilityPublished - imec


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