Valence-band electron-tunneling measurement of the gate work function: application to the high-k / polycrystalline-silicon interface
dc.contributor.author | Pantisano, Luigi | |
dc.contributor.author | Afanas'ev, Valeri | |
dc.contributor.author | Pourtois, Geoffrey | |
dc.contributor.author | Chen, Pei Jun | |
dc.date.accessioned | 2021-10-16T03:52:21Z | |
dc.date.available | 2021-10-16T03:52:21Z | |
dc.date.issued | 2005 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10976 | |
dc.source | IIOimport | |
dc.title | Valence-band electron-tunneling measurement of the gate work function: application to the high-k / polycrystalline-silicon interface | |
dc.type | Journal article | |
dc.contributor.imecauthor | Pourtois, Geoffrey | |
dc.contributor.orcidimec | Pourtois, Geoffrey::0000-0003-2597-8534 | |
dc.source.peerreview | no | |
dc.source.beginpage | 53712 | |
dc.source.journal | Journal of Applied Physics | |
dc.source.issue | 5 | |
dc.source.volume | 98 | |
imec.availability | Published - imec |
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